After a long hiatus, I'm again updating the feature articles on the site. The latest addition reviews advanced activation anneals for ultrashallow junctions. Enjoy!

Hmmm.... 5860 words in February, compared to 13,200 in January. Definitely headed in the wrong direction. I'm not hugely concerned since I did take a week off, but I definitely need to get it in gear. I've got a book to write...

2500 words in March so far, giving me a grand total of 21,560 year to date.

Forbes, quoting an interview in the Financial Times, reports that ASML is considering expanding into other areas of semiconductor manufacturing, perhaps by "buying a cluster of technology companies." Sounds like a good idea on paper, but I'm remembering how much trouble they had digesting the non-lithography parts of SVG. Heck, I'm remembering how much trouble they had digesting the lithography portion of SVG.